JPH0367436U - - Google Patents
Info
- Publication number
- JPH0367436U JPH0367436U JP12834289U JP12834289U JPH0367436U JP H0367436 U JPH0367436 U JP H0367436U JP 12834289 U JP12834289 U JP 12834289U JP 12834289 U JP12834289 U JP 12834289U JP H0367436 U JPH0367436 U JP H0367436U
- Authority
- JP
- Japan
- Prior art keywords
- data storage
- pellet
- mark
- sensor
- stores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 12
- 238000013500 data storage Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834289U JPH0367436U (en]) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834289U JPH0367436U (en]) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367436U true JPH0367436U (en]) | 1991-07-01 |
Family
ID=31676054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12834289U Pending JPH0367436U (en]) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367436U (en]) |
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1989
- 1989-10-31 JP JP12834289U patent/JPH0367436U/ja active Pending